Arnab Choudhury: Amorphous Silicon Carbide for MEMS Applications : Process Development and Techniques of Integration with Stereolithographic Structures - Taschenbuch
2010, ISBN: 3639305272
[EAN: 9783639305272], Neubuch, [PU: VDM Verlag Dez 2010], This item is printed on demand - Print on Demand Neuware - This work describes the development of MEMS fabrication techniques for… Mehr…
[EAN: 9783639305272], Neubuch, [PU: VDM Verlag Dez 2010], This item is printed on demand - Print on Demand Neuware - This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy is described. The test case used in this work to demonstrate the applicability of a-SiC to MEMS is a microscaled four point probe. 180 pp. Englisch<
Amorphous Silicon Carbide for MEMS Applications - neues Buch
ISBN: 9783639305272
This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applic… Mehr…
This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy is described. The test case used in this work to demonstrate the applicability of a-SiC to MEMS is a microscaled four point probe. Bücher, Hörbücher & Kalender / Bücher / Sachbuch / Herstellung & Technik / Herstellungs- & Verfahrenstechnik, [PU: VDM Verlag Dr. Müller, Saarbrücken]<
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Arnab Choudhury: Amorphous Silicon Carbide for Mems Applications - Taschenbuch
ISBN: 9783639305272
Paperback, [PU: VDM Verlag], This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies dem… Mehr…
Paperback, [PU: VDM Verlag], This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy is described. The test case used in this work to demonstrate the applicability of a-SiC to MEMS is a microscaled four point probe., Engineering: General<
Choudhury, Arnab: Amorphous Silicon Carbide for MEMS Applications Process Development and Techniques of Integration with Stereolithographic Structures - neues Buch
2010, ISBN: 3639305272
Kartoniert / Broschiert, mit Schutzumschlag neu, [PU:VDM Verlag]
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Choudhury, Arnab: Amorphous Silicon Carbide for MEMS Applications Process Development and Techniques of Integration with Stereolithographic Structures - neues Buch
Amorphous Silicon Carbide for MEMS Applications : Process Development and Techniques of Integration with Stereolithographic Structures - Taschenbuch
2010, ISBN: 3639305272
[EAN: 9783639305272], Neubuch, [PU: VDM Verlag Dez 2010], This item is printed on demand - Print on Demand Neuware - This work describes the development of MEMS fabrication techniques for… Mehr…
[EAN: 9783639305272], Neubuch, [PU: VDM Verlag Dez 2010], This item is printed on demand - Print on Demand Neuware - This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy is described. The test case used in this work to demonstrate the applicability of a-SiC to MEMS is a microscaled four point probe. 180 pp. Englisch<
Amorphous Silicon Carbide for MEMS Applications - neues Buch
ISBN: 9783639305272
This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applic… Mehr…
This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy is described. The test case used in this work to demonstrate the applicability of a-SiC to MEMS is a microscaled four point probe. Bücher, Hörbücher & Kalender / Bücher / Sachbuch / Herstellung & Technik / Herstellungs- & Verfahrenstechnik, [PU: VDM Verlag Dr. Müller, Saarbrücken]<
Nr. AGLPN2IJEB4. Versandkosten:, Lieferzeit: zwischen 5 - 7 Werktagen Tage, DE. (EUR 0.00)
Arnab Choudhury: Amorphous Silicon Carbide for Mems Applications - Taschenbuch
ISBN: 9783639305272
Paperback, [PU: VDM Verlag], This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies dem… Mehr…
Paperback, [PU: VDM Verlag], This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy is described. The test case used in this work to demonstrate the applicability of a-SiC to MEMS is a microscaled four point probe., Engineering: General<
Choudhury, Arnab: Amorphous Silicon Carbide for MEMS Applications Process Development and Techniques of Integration with Stereolithographic Structures - neues Buch
2010, ISBN: 3639305272
Kartoniert / Broschiert, mit Schutzumschlag neu, [PU:VDM Verlag]
- Versandkosten:Versandkostenfrei innerhalb der BRD. (EUR 0.00) MARZIES.de Buch- und Medienhandel, 14621 Schönwalde-Glien
Choudhury, Arnab: Amorphous Silicon Carbide for MEMS Applications Process Development and Techniques of Integration with Stereolithographic Structures - neues Buch
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This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young's modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy is described. The test case used in this work to demonstrate the applicability of a-SiC to MEMS is a microscaled four point probe.
Detailangaben zum Buch - Amorphous Silicon Carbide for MEMS Applications: Process Development and Techniques of Integration with Stereolithographic Structures
Buch in der Datenbank seit 2008-11-19T20:47:29+01:00 (Vienna) Detailseite zuletzt geändert am 2021-01-25T06:50:38+01:00 (Vienna) ISBN/EAN: 9783639305272
ISBN - alternative Schreibweisen: 3-639-30527-2, 978-3-639-30527-2 Alternative Schreibweisen und verwandte Suchbegriffe: Autor des Buches: choudhury Titel des Buches: applications integration, integration techniques, amorphous silicon, silicon carbide
